INDUSTRY

Bearings FOR SEMICONDUCTOR MANUFACTURING

Designed for Rapid, Repeatable, and Reliable Processing

Schatz precision bearings are essential components in a variety of equipment used in semiconductor, circuit, and chip manufacturing. We provide precision bearing solutions for a variety of highly technical applications derived from years of experience and thorough knowledge of the complications of semiconductor manufacturing environments.

Semiconductor manufacturing applications

Schatz designs and manufactures several ball bearing configurations for semiconductor processing equipment. Bearing configurations can be thin section, angular contact, pre-loaded duplex sets, or custom designed combinations; optimized to maximize performance based on torque, stiffness, and life requirements.

Wafer Processing
Robotics
Polishers
Photolithography Equipment
Dryers
Process Improvement
Spin dryers
Vacuum Environment Applications

Features

Optional stainless steel construction (CRES & CREN Steels)
Hybrid material combinations available, including SiNi balls
High-precision running accuracy
Precision levels ABEC 1F, 3F, 5F, or 7F
Bearing bores up to 14”
Thin section cross-sections of 3/16”, 1/4”, 5/16”, 3/8”, 1/2”, 5/8”, 3/4”, and 1”
Lubrication combinations specific for extended life in semiconductor processing equipment
Custom and industry accepted sealing options
Assembled in world-class ISO Class 6 authorized clean room

Bearings FOR SEMICONDUCTOR MANUFACTURING

Designed for Rapid, Repeatable, and Reliable Processing

Semiconductor manufacturing applications

Features

PRODUCT PARTS AND SPECIFICATIONS

Thin Section Bearings

Custom Ball Bearings

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